Lid unit for thin plate supporting container

ABSTRACT

The present invention is directed to firmly fix a lid unit to a container body, facilitate cleaning and drying of components, and suppress rotation of semiconductor wafers caused by shake. The invention provides a lid unit for a manufacturing line for closing a container body of a thin plate supporting container. A simple attaching/detaching mechanism is provided with: a locking member which is projected and retained by the container body side; a feeding member which is connected to the locking member to make the locking member project/retract; a tip-side cam for pressing a tip side of the locking member to one side when the locking member is projected by the feeding member; a base-end lower cam for pressing a base-end side of the locking member to the other side; and a base-end upper cam and a cam pressing projection for pressing the base-end side to the other side in a manner similar to the base-end lower cam. The simple attaching/detaching mechanism is detachably attached and can be disassembled into components. Supporting ribs for supporting a connecting and supporting plate and a supporting projection bar formed so that its ends are thin and its center portion is thick are also provided.

CROSS-REFERENCE TO RELATED APPLICATION

[0001] This application claims, under 35 USC 119, priority of JapaneseApplication No.2003-140402 filed May 19, 2003 and Japanese ApplicationNo.2003-314640 filed Sep. 5, 2003.

BACKGROUND OF THE INVENTION

[0002] 1. Field of the Invention

[0003] The present invention relates to a lid unit for a thin platesupporting container for housing a thin plate such as a semiconductorwafer, a storage disk, or a liquid crystal glass substrate so as to beused in a storing, transporting, or manufacturing process or the like.

[0004] 2. Related Background Art

[0005] A thin plate supporting container for housing a thin plate suchas a semiconductor wafer so as to be stored or transported is generallyknown.

[0006] The thin plate supporting container is constructed mainly by acontainer body and a lid unit for closing the upper opening of thecontainer body. In the container body, a member for supporting a thinplate such as a semiconductor wafer is provided. Such a thin platesupporting container has to be transferred while maintaining the insideof the container clean in order to prevent soiling of the surface of thethin plate such as a semiconductor wafer housed inside. Consequently,the container is sealed. To be specific, a lid unit is fixed on thecontainer body to airtightly seal the container body. There are variousstructures for fixing the lid unit on the container body.

[0007] The thin plate supporting container transported to asemiconductor manufacturing factory or the like is placed on amanufacturing line and the lid unit is automatically taken off by adedicated apparatus.

[0008] An example of the lid unit adapted to the dedicated apparatus isdisclosed in Japanese Patent Application Laid-Open No. 2001-512288. Alid unit 1 is constructed by, as shown in FIG. 2, a body 2, a cam member3, a latch arm, and a fulcrum 5.

[0009] The cam member 3 is rotatably attached to the body 2. In the cammember 3, a cam portion 6 is provided. In the cam portion 6, a couplingopening 7 having an arched elongated hole shape is provided.

[0010] At the base end of the latch arm 4, an S-shaped cam follower 8 isprovided. The S-shaped cam follower 8 is fit and caught in the couplingopening 7.

[0011] The fulcrum 5 is a projection member provided for the body 2 andsupports the latch arm 4.

[0012] With the structure, when the cam member 3 rotates, the S-shapedcam follower 8 caught in the coupling opening 7 is lifted upward whilebeing moved to the right side in the diagram. Consequently, the latcharm 4 swings around the fulcrum 5 as a center while being projected fromthe body 2 and the tip of the latch arm 4 is pressed downward.

[0013] At this time, the tip of the latch arm 4 is fit in a hole on thecontainer body side. By being pressed downward, the tip of the latch arm4 presses the lid unit against the container body side so as to befixed.

[0014] However, since the lid unit 1 has the configuration that the baseend of the latch arm 4 is lifted upward while being captured by the cammember 3 and projected, thereby swinging the latch arm 4 around thefulcrum 5 as a center, in the sense of the action of a lever, the baseend of the latch arm 4 is the power point, the tip is the point ofapplication, and the fulcrum 5 is the fulcrum.

[0015] In this case, to press the lid unit 1 strongly against thecontainer body in order to increase air tightness in the container body,it is necessary to strongly press the tip of the latch arm 4 against thehole portion on the container body.

[0016] To realize it, the strength of the cam member 3 and the latch arm4 has to be increased for the reason that the interval between the tipof the latch arm 4 and the fulcrum 5 is long. In this case, by movingthe fulcrum 5 toward the tip of the latch arm 4, the tip of the latcharm 4 can be strongly pressed against the hole portion on the containerbody side without increasing the strength of the cam member 3 and thelatch arm 4.

[0017] However, when the fulcrum 5 is moved toward the tip side, thedistance required to lift the base end of the latch arm 4 upward becomeslonger. If the distance to lift is assured, a problem occurs such thatthe lid unit 1 becomes thick.

[0018] On the rear face of the lid unit, a wafer presser is usuallyprovided. The wafer presser supports a semiconductor wafer housed in thecontainer body by pressing the semiconductor wafer from above. As thediameter of a semiconductor wafer increases, the power of supporting thesemiconductor wafer has to be also increased. Accordingly, repulsionfrom the semiconductor wafer, which is received by the wafer presserincreases. Also when the number of semiconductor wafers housedincreases, repulsion from the semiconductor wafers increases. As aresult, the lid unit and the wafer presser are deflected to the outsideby the repulsion and the pressing force in the center portion of thewafer presser is weakened. It causes a problem such that, when vibrationis transmitted from the outside, the semiconductor wafer rotates.

SUMMARY OF THE INVENTION

[0019] The present invention has been achieved in consideration of theabove problems and its object is to provide a lid unit for a thin platesupporting container capable of firmly supporting a thin plate withstrong force without increasing the size and preventing a thin platefrom rotating even when vibration is transmitted from the outside.

[0020] According to a first aspect of the invention, there is provided alid unit for a thin plate supporting container for closing a containerbody of a thin plate supporting container in which a plurality of thinplates are housed and which is carried, including a simpleattaching/detaching mechanism which can be easily firmlyattached/detached to/from the container body, the simpleattaching/detaching mechanism including: a locking member which isprojected and retained by the container body side; a feeding memberwhich is connected to the locking member to make the locking memberproject/retract; a tip-side cam for pressing a tip side of the lockingmember to one side when the locking member is projected by the feedingmember; and a base-end-side cam for pressing a base-end side of thelocking member to the other side when the locking member is projected.

[0021] With the structure, when the locking member is projected by thefeeding member, the tip-side cam presses the tip side of the lockingmember to one side and the base-end-side cam presses the base-end sideof the locking member to the other side. In such a manner, the lid unitis fixed to the container body side.

[0022] According to a second aspect of the invention, in the lid unitfor a thin plate supporting container according to the first aspect, thetip-side cam has an oblique surface for pushing the tip side of thelocking member to one side.

[0023] With the structure, the tip side of the locking member is pushedto the one side by the oblique surface of the tip-side cam and isretained by the container body side.

[0024] According to a third aspect of the invention, in the lid unit fora thin plate supporting container according to the first or secondaspect, the base-end-side cam has an oblique surface for pushing thebase-end side of the locking member to the other side.

[0025] With the structure, the base-end side of the locking member ispressed to the other side by the oblique surface of the base-end-sidecam and retained by the container body side.

[0026] According to a fourth aspect of the invention, in the lid unitfor a thin plate supporting container according to any one of the firstto third aspects, a fulcrum portion of swing of the locking member isprovided on the tip side of the locking member.

[0027] With the structure, the locking member swings around the fulcrumportion as a center. Since the fulcrum portion is provided at the tipside of the locking member, by the action of a lever, the lid unit canbe pressed against the container body with strong force.

[0028] According to a fifth aspect of the invention, in the lid unit fora thin plate supporting container according to any one of the first tofourth aspects, the simple attaching/detaching mechanism is detachablyattached and can be disassembled to component parts.

[0029] With the structure, in the case of cleaning, the simpleattaching/detaching mechanism is detached and disassembled to componentparts and each of the component parts is cleaned. Thus, the componentparts can be cleaned and promptly dried.

[0030] According to a sixth aspect of the invention, there is provided alid unit for a thin plate supporting container for closing a containerbody of a thin plate supporting container in which a plurality of thinplates are housed and which is carried, including a thin plate presserfor supporting thin plates housed in the container body, wherein thethin plate presser has supporting pieces disposed alternately.

[0031] With the structure, the supporting pieces which are disposedalternately support the periphery of a thin plate. The supporting piecesalternately come into contact with the periphery of a thin plate andsupport the periphery with reliability.

[0032] According to a seventh aspect of the invention, in the lid unitfor a thin plate supporting container for closing a container body of athin plate supporting container in which a plurality of thin plates arehoused and which is carried, including a thin plate presser forsupporting thin plates housed in the container body, wherein the thinplate presser includes two contact pieces having supporting piecesdisposed alternately and an elastic supporting plate for elasticallysupporting the contact pieces, the elastic supporting plate is attachedbetween and on both sides of the contact pieces, and the elasticsupporting plate between the contact pieces supports the contact piecesin a state where the elastic supporting plate is slightly floated.

[0033] With the structure, the contact pieces are supported in a statewhere the elastic supporting plate between the contact pieces isslightly floated from an attachment surface. Consequently, a thin plateis usually supported with a force which is not so strong. When a largeshock is given from the outside like case that the thin plate supportingcontainer is dropped by mistake, the elastic supporting plate betweenthe contact pieces comes into contact with the supporting face andstrongly supports the contact pieces. In such a manner, a thin plate isprotected from a strong shock.

[0034] According to an eighth aspect of the invention, there is a lidunit provided for a thin plate supporting container for closing acontainer body of a thin plate supporting container in which a pluralityof thin plates are housed and which is carried, including a lid unitholder for fixing the lid unit from the outside in a state where the lidunit is attached to the container body.

[0035] With the structure, the lid unit holder is attached to thecontainer body to support the lid unit. In such a manner, even if astrong shock is given by dropping or the like, the lid unit does notcome off from the container body.

[0036] According to a ninth aspect of the invention, there is provided alid unit for a thin plate supporting container for closing a containerbody of a thin plate supporting container in which a plurality of thinplates are housed and which is carried, including a thin plate presserfor supporting a plurality of thin plates housed in the container body,wherein the thin plate presser has a plurality of contact pieces whichare disposed in parallel and come into contact with the plurality ofthin plates, and the parallel contact pieces are disposed so that thecontact piece positioned in a center portion is projected to the thinplate side more than the contact pieces positioned on both sides.

[0037] With the structure, the contact pieces disposed so that thecontact piece in the center portion is projected to the thin plate sidemore than the contact pieces on both sides absorb deflection of the lidunit and can support thin plates with uniform force.

[0038] According to a tenth aspect of the invention, in the lid unit fora thin plate supporting container according to the ninth aspect, thethin plate presser includes: a base-end supporting portion fixed to therear surface of the lid unit; and a plurality of elastic supportingplates supported by the base-end supporting portion and each supportingone end of each of the contact pieces, and each of the elasticsupporting plates for supporting the contact pieces is formed so thatthe contact piece positioned in the center portion is projected to thethin plate side more than the contact pieces positioned on both sides.

[0039] With the structure, the elastic supporting plate supports one endof each of the contact pieces so that the contact piece in the centerportion is projected to the thin plate side more than the contact pieceson both sides among the contact pieces which are disposed in parallel.Thus, deflection of the lid unit can be absorbed and thin plates can besupported with uniform force.

[0040] According to an eleventh aspect of the invention, in the lid unitfor a thin plate supporting container according to the ninth aspect, thethin plate presser includes: a base-end supporting portion fixed to therear surface of the lid unit; a plurality of one-side elastic supportingplates supported by the base-end supporting portion and each supportingone end of each of the contact pieces; and a plurality of other-sideelastic supporting plates each supporting the other end of each of thecontact pieces and in contact with the rear surface of the lid unit, andany one of the one-side elastic supporting plate and the other-sideelastic supporting plate for supporting each of the contact pieces orboth are/is formed so that the contact piece positioned in the centerportion is projected to the thin plate side more than the contact piecespositioned on both sides.

[0041] With the structure, the one-side elastic supporting plate and/orthe other-side elastic supporting plate support each of the contactpieces so that the contact piece positioned in the center portion isprojected to the thin plate side more than the contact pieces positionedon both sides among the contact pieces disposed in parallel. Thus,deflection of the lid unit can be absorbed and each of thin plates canbe supported with uniform force.

[0042] According to a twelfth aspect of the invention, in the lid unitfor a thin plate supporting container according to the ninth aspect, thethin plate presser includes: a base-end supporting portion fixed to therear surface of the lid unit; a plurality of one-side elastic supportingplates supported by the base-end supporting portion and each supportingone end of each of the contact pieces; a plurality of other-side elasticsupporting plates each supporting the other end of each of the contactpieces and in contact with the rear surface of the lid unit; and asupporting projection bar provided on the rear surface side of the lidunit and in contact with the other-side elastic supporting plates tothereby support the other-side elastic supporting plates, and any one ofthe supporting projection bar and the other-side elastic supportingplate or both are/is formed so that the contact piece positioned in thecenter portion is projected to the thin plate side more than the contactpieces positioned on both sides.

[0043] With the structure, the supporting projection bar and/or theother-side elastic supporting plate support each of the contact piecesso that the contact piece positioned in the center portion is projectedto the thin plate side more than the contact pieces positioned on bothsides among the contact pieces disposed in parallel. Thus, deflection ofthe lid unit can be absorbed and each of thin plates can be supportedwith uniform force.

[0044] According to a thirteenth aspect of the invention, in the lidunit for a thin plate supporting container according to any of the ninthto twelfth aspects, the contact piece has a V-shaped groove having aninclination of 40° to 44°.

[0045] With the structure, when the periphery of a thin plate is fit inthe V-shaped groove having the inclination of 40° to 44°, the V-shapedgroove catches the periphery of the thin plate, and the thin plate canbe supported with reliability.

[0046] According to a fourteenth aspect of the invention, there isprovided a lid unit for a thin plate supporting container for closing acontainer body of a thin plate supporting container in which a pluralityof thin plates are housed and which is carried, including a thin platepresser for supporting thin plates housed in the container body, thethin plate presser including: two base-end supporting portions fixed toa rear surface side of the lid unit; a plurality of contact pieces whichare disposed along the periphery of the thin plate and come into directcontact with the thin plate; two elastic supporting plates supported bythe base-end supporting portions and each supporting an outer end ofeach of contact pieces at both ends among the plurality of contactpieces; a connecting and supporting plate for connecting and supportingthe contact pieces; and a supporting member for preventing a deviationalong the rear surface of the lid unit of the connecting and supportingplate while permitting fluctuations in the direction perpendicular tothe rear surface of the lid unit.

[0047] With the structure, an outer end of each of contact pieces atboth ends among the plurality of contact pieces is supported by theelastic supporting plate, the contact pieces are supported by theconnecting and supporting plate, and the connecting and supporting plateis supported by the supporting member, thereby supporting the peripheryof a thin plate by the contact pieces with reliability. Particularly,the contact pieces are supported by the connecting and supporting platesupported by the supporting member, so that each of the contact piecescan be prevented from being deviated along the rear surface of the lidunit, and a thin plate can be supported with reliability.

[0048] According to a fifteenth aspect of the invention, in the lid unitfor a thin plate supporting container according to the fourteenthaspect, the supporting member has supporting ribs each for supportingeach of the connecting and supporting plates so as not to be deviatedalong the rear surface of the lid unit.

[0049] With the structure, the supporting ribs support the connectingand supporting plates, so that the contact pieces can be prevented frombeing deviated along the rear surface of the lid unit, and a thin platecan be supported with reliability.

[0050] According to a sixteenth aspect of the invention, in the lid unitfor a thin plate supporting container according to the fourteenthaspect, the supporting member has a fitting projection which is fit in afitting hole formed in the connecting and supporting plate, therebypreventing a deviation along the rear surface of the lid unit of theconnecting and supporting plate while permitting fluctuations in adirection perpendicular to the rear surface of the lid unit.

[0051] With the strucure, the fitting projection is fit into the fittinghole formed in the connecting and supporting plate to support theconnecting and supporting plate. Thus, contact pieces can be preventedfrom being deviated along the rear surface of the lid unit, and a thinplate can be supported with reliability.

[0052] According to a seventeenth aspect of the invention, in the lidunit for a thin plate supporting container according to the fourteenthaspect, elastic force for supporting the contact piece by the connectingand supporting plate is stronger than elastic force for supporting thecontact piece by the elastic supporting plate.

[0053] With the structure, by making the elastic force for supportingthe contact piece by the connecting and supporting plate strong, thedifference between the elastic force (supporting force) in the centerportion of the thin plate presser and that in the end portion iseliminated. The force of pressing thin plates can be wholly equalizedand the thin plates can be supported with reliability.

[0054] As described above in detail, the lid unit for a thin platesupporting container of the invention produces the following effects.

[0055] (1) Since the locking member is projected by using the action ofa lever, the lid unit for a manufacturing line can be fixed to thecontainer body with strong force.

[0056] (2) Since the simple attaching/detaching mechanism can be easilydisassembled to component parts, in the case of cleaning, the simpleattaching/detaching mechanism can be detached and disassembled tocomponent parts. Each of the component parts can be cleaned and promptlydried.

[0057] (3) Since the supporting pieces are disposed alternately, thesupporting pieces alternately come into contact with the periphery of athin plate and can support the periphery with reliability.

[0058] (4) The contact pieces are supported in such a manner that thecontact piece in the center portion is projected to the thin plate sidemore than the contact pieces on both sides. Consequently, deflection ofthe lid unit can be absorbed and thin plates can be supported withuniform force.

[0059] (5) The elastic supporting plate supports so that the contactpiece in the center portion is projected to the thin plate side morethan the contact pieces on both sides among the contact pieces which aredisposed in parallel. Thus, deflection of the lid unit can be absorbedand thin plates can be supported with uniform force.

[0060] (6) Since the one-side elastic supporting plate and/or theother-side elastic supporting plate support each of the contact piecesso that the contact piece positioned in the center portion is projectedto the thin plate side more than the contact pieces positioned on bothsides among the contact pieces disposed in parallel, deflection of thelid unit can be absorbed and each of thin plates can be supported withuniform force.

[0061] (7) The supporting projection bar and/or the other-side elasticsupporting plate support each of the contact pieces so that the contactpiece positioned in the center portion is projected to the thin plateside more than the contact pieces positioned on both sides among thecontact pieces disposed in parallel. Thus, deflection of the lid unitcan be absorbed and each of thin plates can be supported with uniformforce.

[0062] (8) Since the connecting and supporting plate between the contactpieces is supported by the supporting member, each of the contact piecescan be prevented from being deviated along the rear surface of the lidunit, and the thin plate can be supported with reliability.

[0063] (9) Since the connecting and supporting plate is supported by thesupporting ribs, the contact pieces can be prevented from being deviatedalong the rear surface of the lid unit, and a thin plate can besupported with reliability.

[0064] (10) Since the fitting projection is fit into the fitting holeformed in the connecting and supporting plate to support the connectingand supporting plate, contact pieces can be prevented from beingdeviated along the rear surface of the lid unit, and a thin plate can besupported with reliability.

[0065] (11) By making the elastic force for supporting the contact pieceby the connecting and supporting plate strong, the difference betweenthe supporting force in the center portion of the thin plate presser andthat in the end portion is eliminated. The force of pressing thin platescan be equalized as a whole and the thin plates can be supported withreliability.

BRIEF DESCRIPTION OF THE DRAWINGS

[0066]FIG. 1 is a partial perspective view showing a lid unit for amanufacturing line according to a first embodiment of the invention.

[0067]FIG. 2 is a sectional side elevation of a conventional lid unitfor a thin plate supporting container.

[0068]FIG. 3 is a perspective view showing the thin plate supportingcontainer according to the first embodiment of the invention.

[0069]FIG. 4 is a perspective view of the thin plate supportingcontainer according to the first embodiment of the invention in a statewhere the lid unit is taken off.

[0070]FIG. 5 is a partial perspective view showing a lid unit receivingportion of the thin plate supporting container according to the firstembodiment of the invention.

[0071]FIG. 6 is a partial cross section of the lid unit receivingportion of the thin plate supporting container according to the firstembodiment of the invention.

[0072]FIG. 7 is a perspective view showing the top face of a lid unitfor a manufacturing line according to the first embodiment of theinvention.

[0073]FIG. 8 is a perspective view showing the under face of the lidunit for the manufacturing line according to the first embodiment of theinvention.

[0074]FIG. 9 is a perspective view showing the top face of a lockingmember according to the first embodiment of the invention.

[0075]FIG. 10 is a perspective view showing the under face of thelocking member according to the first embodiment of the invention.

[0076]FIG. 11 is a sectional side view showing the locking memberaccording to the first embodiment of the invention.

[0077]FIG. 12 is a perspective view showing the top face of a feedingmember according to the first embodiment of the invention.

[0078]FIG. 13 is a perspective view showing the back face of the feedingmember according to the first embodiment of the invention.

[0079]FIG. 14 is a plan view showing the feeding member according to thefirst embodiment of the invention.

[0080]FIG. 15 is a diagram showing the back face of the feeding memberaccording to the first embodiment of the invention.

[0081]FIG. 16 is a perspective view showing the top face of a holdingcover according to the first embodiment of the invention.

[0082]FIG. 17 is a perspective view showing the back face of the holdingcover according to the first embodiment of the invention.

[0083]FIG. 18 is a perspective view showing the top face of a coverpresser according to the first embodiment of the invention.

[0084]FIG. 19 is a perspective view showing the top face of the coverpresser according to the first embodiment of the invention.

[0085]FIG. 20 is a side view showing a wafer presser according to thefirst embodiment of the invention.

[0086]FIG. 21 is a perspective view showing the wafer presser accordingto the first embodiment of the invention.

[0087]FIG. 22 is a perspective view showing the wafer presser accordingto the first embodiment of the invention.

[0088]FIG. 23 is a perspective view showing a lid unit holder accordingto the first embodiment of the invention.

[0089]FIGS. 24A to 24D are schematic diagrams showing the operation of asimple attaching/detaching mechanism according to the first embodimentof the invention.

[0090]FIG. 25 is a sideview showing the wafer presser according to afirst modification of the first embodiment of the invention.

[0091]FIG. 26 is a perspective view showing the wafer presser accordingto the first modification of the first embodiment of the invention.

[0092]FIG. 27 is a perspective view showing the wafer presser accordingto the first modification of the first embodiment of the invention.

[0093]FIG. 28 is a perspective view showing the wafer presser accordingto a second modification of the first embodiment of the invention.

[0094]FIG. 29 is a front view showing the wafer presser according to thesecond modification of the first embodiment of the invention.

[0095]FIG. 30 is a perspective view showing the wafer presser accordingto a third modification of the first embodiment of the invention.

[0096]FIG. 31 is a cross section of a main portion showing the waferpresser according to the third modification of the first embodiment ofthe invention.

[0097]FIG. 32 is a perspective view showing a wafer presser according toa fourth modification of the first embodiment of the invention.

[0098]FIG. 33 is a front view showing the wafer presser according to thefourth modification of the first embodiment of the invention.

[0099]FIG. 34 is a perspective view of a main portion of the waferpresser according to a second embodiment of the invention.

[0100]FIG. 35 is a perspective view showing the back face of the lidunit including the wafer presser according to the second embodiment ofthe invention.

[0101]FIG. 36 is a partial perspective view showing the back face of thelid unit including the wafer presser according to the second embodimentof the invention.

[0102]FIG. 37 is a perspective view of a main portion showing the backface of the lid unit according to the second embodiment of the inventionin a state where the wafer presser is removed.

[0103]FIG. 38 is a partial perspective view showing the back face of thelid unit according to the second embodiment of the invention in a statewhere the wafer presser is removed.

[0104]FIG. 39 is a perspective view showing a section of a supportingrib according to the second embodiment of the invention.

[0105]FIG. 40 is an enlarged view of a main portion showing the waferpresser according to the second embodiment of the invention.

[0106]FIG. 41 is an enlarged view of a main portion showing a contactpiece of the wafer presser according to the second embodiment of theinvention.

[0107]FIG. 42 is an enlarged view of a main portion showing the contactpiece of the wafer presser according to the second embodiment of theinvention.

[0108]FIG. 43 is a cross section of a main portion of the contact pieceof the wafer presser according to the second embodiment of theinvention.

[0109]FIG. 44 is a perspective view of a main portion showing amodification of the second embodiment of the invention.

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0110] Embodiments of the invention will be described here in below withreference to the appended drawings. A thin plate supporting container ofthe invention is a container for housing thin plates such as asemiconductor wafer, a storage disk, and a liquid crystal glasssubstrate so as to be used for storage, transport, manufacturing line,and the like. A thin plate supporting container for housingsemiconductor wafers will be described here as an example. Lid units forclosing a thin plate supporting container are properly used as a lidunit for transport and a lid unit for use in a manufacturing line.

First Embodiment

[0111] A thin plate supporting container 11 according to a firstembodiment has, as shown in FIGS. 3 to 8, a container body 12 forhousing therein a plurality of semiconductor wafers (not shown), twothin plate supporting portions 13 provided on opposite side walls in thecontainer body 12 and supporting housed semiconductor wafers from bothsides, a lid unit 14 for transport and a lid unit 15 for a manufacturingline, each for covering the container body 12, a top flange 16 held byan arm of a transporting apparatus (not shown) in a factory, and ahandle 17 for carry which is grasped by a worker when the worker carriesthe thin plate supporting container 11.

[0112] The container body 12 is formed in an almost cube shape as shownin FIGS. 3 and 4. The container body 12 is constructed by four sidewalls12A, 12B, 12C, and 12D serving as peripheral walls and a bottom plate12E when the container body 12 is set in the portrait orientation, andan opening 12F is provided at the top of the container body 12. When thecontainer body 12 is installed so as to face a robot (not shown) forcarrying wafers in a manufacturing line of semiconductor wafers or thelike, it is set in the landscape orientation. On the outside of the sidewall 12A, which serves as the bottom when the supporting container 11 isset in the landscape orientation, means (not shown) for positioning thethin plate supporting container 11 is provided. The top flange 16 isdetachably attached to the outside of the side wall 12A serving as theceiling when the supporting container 11 is set in the landscapeorientation. To the outside of the side walls 12C and 12D serving asside walls when the supporting container 11 is set in the landscapeorientation, the handles 17 for carry are detachably attached.

[0113] In the upper ends of the side walls 12A, 12B, 12C, and 12D of thecontainer body 12, a lid unit receiving portion 21 to which the lid unit14 is fit is provided as shown in FIGS. 5 and 6. The lid unit receivingportion 21 is formed by expanding the upper end portion of the containerbody 12 to the dimension of the lid unit 4. Consequently, the lid unit 4is attached to the lid unit receiving portion 21 by being fit in avertical plate portion 21A of the lid unit receiving portion 21 andcoming into contact with a horizontal plate portion 21B. Further, a sealgroove 21C is provided in the whole circumference of the horizontalplate portion 21B, and a gasket 22 attached to the under face of the lidunit 14 for transport is fit in the seal groove 21C, thereby keeping airtightness in the thin plate supporting container 11. In the inner faceof the vertical plate portion 21A at the four corners of the lid unitreceiving portion 21, first fitting portions 23 in which lid unitlocking pawls (not shown) of a simple attaching/detaching mechanism 26to be described later are fit, thereby fixing the lid unit 14 fortransport to the container body 12 side are provided. The first fittingportion 23 is formed by forming a dent in a square shape in the verticalplate portion 21A. The lid unit locking pawls are fit in the top face onthe inner side of the first fitting portion 23.

[0114] Further, near each of the first fitting portions 23, a secondfitting portion 24 is provided. The second fitting portion 24 is usedfor the manufacturing line. In the second fitting portion 24, a lockingmember 42 of a simple attaching/detaching mechanism 32 of the lid unit15 for the manufacturing line is fit, thereby fixing the lid unit 15 forthe manufacturing line to the container body 12 side.

[0115] The lid unit 14 for transport is a known lid unit. The lid unit14 for transport is formed in a saucer shape and its center portion isformed as swelling in a cylindrical shape so as not to come into contactwith the upper portion of a semiconductor wafer housed therein.

[0116] At each of the four corners of the lid unit 14 for transport, asshown in FIGS. 3 and 4, the simple attaching/detaching mechanism 26 fortransport for detachably fixing the lid unit 14 for transport to thecontainer body 12 is provided. The simple attaching/detaching mechanism26 for transport is constructed mainly by including lid unit lockingpawls (not shown) provided so as to be projected from the peripheralportion of the lid unit 14 for transport. The lid unit locking pawls arefit in the first fitting portions 23.

[0117] The lid unit 15 for the manufacturing line is a lid unit forenabling the container body 12 of the transported thin plate supportingcontainer 11 to be used as it is for the manufacturing line in thefactory. The lid unit 15 for the manufacturing line is placed in asemiconductor manufacturing factory or the like as a single productindependent of the thin film supporting container 11. The lid unit 15for the manufacturing line is constructed by, as shown in FIGS. 7 and8,a body 30, a cover plate (notshown), and the simpleattaching/detaching mechanism 32.

[0118] The body 30 is formed thinly in an almost square shape so as notto stick out in a state where it is attached to the lid unit receivingportion 21 of the container body 12. Around the lower portion of thebody 30, a gasket receiving portion 31 is attached. A gasket (not shown)is provided for the gasket receiving portion 31. In a state where thebody 30 is attached to the lid unit receiving portion 21, the gasketreceiving portion 31 is fit in the seal groove 21C to seal the containerbody 12. The gasket is properly formed in accordance with the shape ofthe seal groove 21C in a manner similar to the gasket 22 of the lid unit14 for transport.

[0119] At each of end portions on both sides in the longitudinaldirection (both lower right and upper left) sides in FIG. 7) of the body30 of the lid unit 15 for the manufacturing line, a recess 33 to whichthe simple attaching/detaching mechanism 32 is attached is formed. Therecess 33 is formed by denting the end portion of the body 30 in analmost rectangular shape. At each of both end portions in thelongitudinal direction of the recess 33 (both ends on the upper rightand lower left) sides in FIG. 7), an opening 34 from which a tip fittingportion 56 of the locking member 42 to be described later projects isprovided. The opening 34 is provided in a position corresponding to theposition of the second fitting portion 24 in the lid unit receivingportion 21 in a state where the body 30 is fit in the lid unit receivingportion 21. On the bottom of the recess 33, a rotation supporting shaft36, stoppers 37, locking pawls 38, base-end lower cams 39, and atip-side cam 40 are provided. To the recess 33, a cover plate isdetachably attached. The cover plate is detached at the time of cleaningthe simple attaching/detaching mechanism 32 to be provided in the recess33.

[0120] The rotation supporting shaft 36 is a member for rotatablysupporting a feeding member 43 which will be described later. Therotation supporting shaft 36 is provided so as to be raised from thebottom in a cylindrical shape. The rotation supporting shaft 36 is fitin a rotation cylindrical portion 63 in the feeding member 43 andsupports the feeding member 43 rotatably. The stopper 37 is a member forsupporting the feeding member 43 in a state where the feeding member 43is turned at a predetermined angle. The stopper 37 is constructed byplate-shaped members raised from the bottom in two positions around therotation supporting shaft 36. By curving the plate-shaped members,receiving portions 37A are formed. By fitting a projection 65A of aengaging piece 65 of the feeding member 43 with the receiving portion37A, the feeding member 43 is supported at a predetermined angle.

[0121] The locking pawl 38 is a member for fixing a cover presser 46, tobe described later, to the bottom of the recess 33. The cover pressers46 are provided on both sides in the longitudinal direction of therecess 33, so that six pieces of locking pawls 38 are attached on eachof both sides in the longitudinal direction of the recess 33. Thelocking pawl 38 is a member having an L shape. A lower supporting platepiece 88 of the cover presser 46 fits with the locking pawl 38.

[0122] The base-end lower cam 39 and the tip-side cam 40 are membersconstructing a cam mechanism 44 to be described later. The base-endlower cam 39 and, to be described later, a base-end upper cam 53construct a base-end-side cam for pressing the base-end side of thelocking member 42 downward to make the locking member 42 project.

[0123] The base lower-side cam 39 is, as shown in FIGS. 1 and 7, amember for pressing the base-end side of the locking member 42 to theother side (downward in FIG. 1) to make the locking member 42 project.The base-end lower cams 39 are provided on both sides of the rotationsupporting shaft 36. The base-end lower cam 39 is formed so that itsside sectional shape is an almost triangle shape, and has an obliquesurface 39A along which the base-end side of the locking member 42 ismoved upward/downward. The oblique surface 39A is mirror-finished toreduce frictional resistance with a base-end-side sliding surface 52 ofthe locking member 42.

[0124] The tip-side cam 40 is a member for pressing (lifting) the tipfitting portion 56 of the locking member 42 to one side (upward inFIG. 1) in association with projection of the locking member 42. Thetip-side cam 40 is provided at each of both ends in the longitudinaldirection of the recess 33 so as to face the opening 34. The tip-sidecam 40 is formed so that its side sectional shape is a triangle shapeand has an oblique surface 40A for lifting the tip side of the lockingmember 42 upward. The oblique surface 40A is mirror-finished so as toreduce frictional resistance with a tip-side sliding face 55A of afulcrum portion 55 of the locking member 42. At an upper end of theoblique surface 40A, a fitting recess 40B is provided. The fittingrecess 40B is a portion in which the fulcrum portion 55 of the lockingmember 42 is fit.

[0125] In the recess 33, the simple attaching/detaching mechanism 32 isprovided. The simple attaching/detaching mechanism 32 is a mechanism forenabling the lid unit 15 for the manufacturing line to be easilyattached/detached to/from the container body 12. The simpleattaching/detaching mechanism 32 is constructed by, as shown in FIG. 1,the locking member 42, the feeding member 43, the cam mechanism 44, aholding cover 45, and the cover presser 46.

[0126] The locking member 42 is a member which is projected from theopening 34 in the body 30 and is fit into the second recess 24 in thelid unit receiving portion 21 in a state where the lid unit 15 for themanufacturing line is attached to the lid unit receiving portion 21 ofthe container body 12. The locking member 42 is constructed by, as shownin FIG. 1 and FIGS. 9 to 11, a coupling shaft 51, the base-end-sidesliding surface 52, the base-end upper cam 53, an upper groove 54, thefulcrum portion 55, the tip fitting portion 56, a base-end side plate57, and a tip side plate 58.

[0127] The coupling shaft 51 is a member which is fit into an archedelongated hole 64 in the feeding member 43 which will be describedlater, thereby coupling the feeding member 43 and the locking member 42to each other. The coupling shaft 51 is formed in a round bar shape andprovided in the base end portion of the locking member 42 so as to bedirected upward.

[0128] The base-end-side sliding surface 52 is a portion which comesinto slidable contact with the oblique surface 39A of the base-end lowercam 39 to vertically move the base end portion of the locking member 42.The base-end-side sliding surface 52 is formed by obliquely cutting alower portion of the base end of the locking member 42. Thebase-end-side sliding surface 52 is mirror-finished to reduce frictionalresistance with the oblique surface 39A of the base-end lower cam 39.When the locking member 42 is projected in a state where thebase-end-side sliding surface 52 is in the slidable contact with theoblique surface 39A of the base-end lower cam 39, the base-end portionof the locking member 42 is pushed downward. When the locking member 42is retracted, the base-end portion of the locking member 42 is pushedupward.

[0129] The base-end upper cam 53 is a portion for vertically moving thebase-end portion of the locking member 42 in cooperation with thebase-end lower cam 39. The base-end upper cam 53 is a portion serving asthe power point in the action of a lever. The coupling shaft 51 does notserve as the power point in the action of a lever but is a portion forsimply receiving the power in the longitudinal direction when thelocking member 42 is projected/retracted.

[0130] The base-end upper cam 53 is provided near the base end portionof the locking member 42 so as to be directed upward. The base-end uppercam 53 is formed so that its side face sectional shape is a triangleshape and has an oblique surface 53A by which the base side of thelocking member 42 is moved vertically. The oblique surface 53A of thebase-end upper cam 53 is mirror-finished in a manner similar to theoblique surface 39A of the base-end lower cam 39 and is in slidablecontact with a cam pressing projection 69 on the holding cover 45 sidewhich will be described later. The oblique surface 53A of the base-endupper cam 53 is set so as to be almost parallel with the oblique surface39A of the base-end lower cam 39. With the configuration, when thelocking member 42 is projected in a state where the cam pressingprojection 69 is in slidable contact with the oblique surface 53A of thebase-end upper cam 53, the base-end upper cam 53 is pressed by the campressing projection 69 and the base-end portion of the locking member 42is pushed downward. When the locking member 42 is retracted, thebase-end sliding surface 52 is pressed by the oblique surface 39A of thebase-end lower cam 39, and the base-end portion of the locking member 42is pushed upward.

[0131] The fulcrum portion 55 is a portion which supports the tipportion of the locking member 42 and serves as the center of rotation.The fulcrum portion 55 is a portion serving as a fulcrum in the actionof a lever. The fulcrum portion 55 is formed in a square shape having analmost right angle on the under face of the tip portion of the lockingmember 42. At the vertex portion of the fulcrum portion 55 having thesquare shape, the tip sliding surface 55A is formed. The tip slidingsurface 55A is a portion which comes into slidable contact with theoblique surface 40A of the tip-side cam 40 to vertically move the tipfitting portion 56 of the locking member 42. The tip sliding surface 55Ais formed by obliquely cutting the vertex portion of the fulcrum portion55. The tip sliding surface 55A is mirror-finished so as to reducefrictional resistance with the oblique surface 40A of the tip-side cam40. When the locking member 42 is projected in a state where the tipsliding surface 55A is in slidable contact with the oblique surface 40Aof the tip-side cam 40, the tip fitting portion 56 of the locking member42 is pushed upward. When the locking member 42 is retracted, the tipportion of the locking member 42 is pushed downward.

[0132] Further, the fulcrum portion 55 is fit in the fitting recess 40Bof the tip-side cam 40 and swings around the fitting recess 40B as acenter.

[0133] The tip fitting portion 56 is a portion which is projected to theoutside from the opening 34 in the recess 33 and is directly fit in thesecond fitting portion 24 of the lid unit receiving portion 21. The tipfitting portion 56 serves as the point of application in the action of alever. The tip fitting portion 56 is provided with a small distance fromthe fulcrum portion 55 so as to display sufficient power in a statewhere it is fit in the second recess 24 in the lid unit receivingportion 21.

[0134] The base-end side plates 57 and the tip side plates 58 aremembers for allowing reciprocating movement while supporting the lockingmember 42.

[0135] The feeding member 43 is a member which is connected to thelocking member 42 to make the locking member 42 project/retract. Thefeeding member 43 is rotatably attached to the rotation supporting shaft36 of the recess 33. The feeding member 43 is constructed by, as shownin FIGS. 1, 7, 12, 13, 14, and 15, a top plate 61, a key groove 62, therotation cylindrical portion 63, the arched elongated hole 64, and anengagement piece 65.

[0136] The top plate 61 is formed in an almost disc shape. In twoopposite positions in the top plate 61, notches 66 each for providingthe engagement piece 65 are formed.

[0137] The key groove 62 is a groove in which a latch key of a lid unitattaching/detaching apparatus (not shown) is fit at the time ofautomatically attaching/detaching the lid unit 15 for the manufacturingline by the apparatus. The key groove 62 is provided in the center ofthe upper surface of the top plate 61.

[0138] The rotation cylindrical portion 63 is a member for rotatablyattaching the feeding member 43 to the rotation supporting shaft 36 ofthe recess 33. The rotation cylindrical portion 63 is provided in thecenter of the under surface of the top plate 61. In the center of therotation cylindrical portion 63, the key groove 62 is positioned.

[0139] The arched elongated hole 64 is a portion for converting therotation of the feeding member 43 to the projecting/retracting operationof the locking member 42. The arched elongated hole 64 is formed in eachof two opposite positions in the top plate 61. The arched elongated hole64 is formed by a part of a spiral so that its one end 64A is close tothe center of the top plate 61 and the other end 64B is far from thecenter. When the coupling shaft 51 of the locking member 42 is fit atthe one end 64A of the arched elongated hole 64, the locking member 42is retracted. When the coupling shaft 51 is fit at the other end 64B,the locking member 42 is projected.

[0140] On the under surface of the top plate 61 in the arched elongatedhole 64, a gently sloped wall surface 64C is provided. The wall surface64C is set so that its height is the same as that of the under surfaceof the top plate 61 at one end 64A of the arched elongated hole 64 andgradually increases toward the other end 64B in order to connect thelocking member 42 and the feeding member 43 with reliability. That is,in a state where the coupling shaft 51 of the locking member 42 is fitin the other end 64B of the arched elongated hole 64, the base-endportion of the locking member 42 is pushed downward. Even in the statewhere the base-end portion is pushed down, with the structure, thecoupling shaft 51 can be fit in the arched elongated hole 64 withreliability.

[0141] The engagement piece 65 is a member for supporting the feedingmember 43 in a state where the feeding member 43 swings only by apredetermined angle. The engagement pieces 65 are provided in twoopposite positions in the periphery of the top plate 61. The engagementpiece 65 is constructed by a plate member extended from the top plate 61a long the periphery. At the tip of the engagement piece 65, theprojection 65A to be fit in the receiving portion 37A of the stopper 37is provided. The engagement piece 65 has elasticity and elasticallysupports the projection 65A. By fitting of the projection 65A in thereceiving portion 37A of the stopper 37, the feeding member 43 issupported at the predetermined swing angle (an angle at which thelocking member 42 is projected to fix the lid unit 15 for themanufacturing line to the container body 12).

[0142] The cam mechanism 44 is a member which comes into contact withthe top face of the second fitting portion 24 in a state where the tipfitting portion 56 of the locking member 42 fed by the feeding member 43is fit in the second fitting portion 24 in the lid unit receivingportion 21 to thereby press the lid unit 15 for the manufacturing linedownward and fix the lid unit 15 to the container body 12 side. With thecam mechanism 44, the tip fitting portion 56 of the locking member 42fed by the feeding member 43 is pressed down so as to come into contactwith the top face of the second fitting portion 24 and the base-endportion is pressed downward, thereby pressing the lid unit 15 for themanufacturing line downward and fixing the lid unit 15 to the containerbody 12 side by the action of a lever. The cam mechanism 44 isconstructed by the base-end lower cam 39, base-end upper cam 53,base-end-side sliding surface 52, cam pressing projection 69, tip-sidecam 40, and tip sliding surface 55A. The base-end lower cam 39, base-endupper cam 53, base-end-side sliding surface 52, tip-side cam 40, and tipsliding surface 55A are as described above.

[0143] The cam pressing projection 69 is a member which comes intocontact with the oblique surface 53A of the base-end upper cam 53 andpresses the base-end portion of the locking member 42 downward inassociation with projection of the locking member 42. The cam pressingprojection 69 is provided on the under face of the holding cover 45.Specifically, in a state where the base-end-side sliding surface 52 ofthe locking member 42 is in slidable contact with the oblique surface39A of the base-end lower cam 39, the cam pressing projection 69 ispositioned so as to be in slidable contact with the oblique surface 53Aof the base-end upper cam 53 without a gap.

[0144] The holding cover 45 is a member for holding the locking member42 and the feeding member 43. The holding cover 45 is constructed by, asshown in FIGS. 16 and 17, a feeding member holding portion 71 and alocking member holding portion 72.

[0145] The feeding member holding portion 71 is a member for supportingthe feeding member 43 in a state where rotation of the feeding member 43is allowed. The feeding member holding portion 71 is constructed byperipheral plates 74 and a top plate 75. The peripheral plates 74 areformed so as to cover the periphery of the feeding member 43. The topplate 75 is formed so as to cover the upper side of the feeding member43. In the center portion of the top plate 75, a key hole 76 having thesame size as that of the key groove 62 in the feeding member 43 isprovided. The key hole 76 is aligned with the key groove 62 in thefeeding member 43 in a state where the feeding member 43 is covered withthe top plate 75. With the configuration, in a state where the lockingmember 42 is retracted, the key groove 62 and the key hole 76 arealigned with each other.

[0146] The locking member holding portion 72 is a member for supportingthe locking member 42 in a reciprocating state. The locking memberholding portions 72 are provided on both right and left sides of thefeeding member holding portion 71. Each of the locking member holdingportions 72 is constructed by side plates 78 and a top plate 79.

[0147] The side plates 78 are members for supporting the base-endportion of the locking member 42 from the right and left sides. The sideplate 78 is constructed by a wide portion 78A and an arrow portion 78B.The wide portion 78A is a portion into which the base-end side plate 57of the locking member 42 is fit. The narrow portion 78B is a portion inwhich the portion between the base-end side plate 57 and the tip-sideplate 58 in the locking member 42 is fit.

[0148] The top plate 79 is a member for supporting the locking member 42from above. In the base-end portion in the under face of the top plate,the above-described cam pressing projection 69 is provided. At the endsin the under face of the top plate 79, projections 80 for support, whichare fit into the upper grooves 54 in the locking member 42, areprovided. On the tip side of the top plate 79, slits 81 are opened and aprojected portion 82 is provided at the end of the slit 81. Theprojected portion 82 is constructed by a center projected piece 82A andright and left retaining pieces 82B and is elastically supported by theslits 81. When the center projected piece 82A and the right and leftretaining pieces 82B of the projected portion 82 are fit in across-shaped notch 86A of the cover presser 46, the holding cover 45 andthe cover presser 46 are positioned.

[0149] As shown in FIGS. 1, 18, and 19, the cover presser 46 is a memberfor fixing the holding cover 45 to the recess 33 in the lid unit 15 forthe manufacturing line. Specifically, the two cover pressers 46 supportseach of the locking member holding portions 72 to fix the holding cover45 to the recess 33. The cover presser 46 is constructed by side plates85, a top plate 86, upper supporting plate pieces 87, and the lowersupporting plate pieces 88.

[0150] The side plates 85 cover the right and left sides of the lockingmember 42 while allowing reciprocating motion of the locking member 42.The top plate 86 integrally supports the side plates 85 and covers thetop of the locking member 42 while allowing reciprocating motion of thelocking member 42. The upper supporting plate pieces 87 are members forsupporting the top plate 79 of the locking member holding portion 72 ofthe holding cover 45 from below. The top plate 79 of the locking memberholding portion 72 is supported from top and bottom by the top plate 86and upper supporting plate pieces 87 of the cover presser 46. The lowersupporting plate piece 88 is a portion for fixing the cover presser 46to the recess 33. Three lower supporting plate pieces 88 are provided atthe lower end of each of the side plates 85. The lower supporting platepieces 88 fit with the locking pawls 38 provided for the recess 33,thereby fixing the cover presser 46 to the recess 33. Each of the lowersupporting plate pieces 88 has a taper 88A so as to easily fit with thelocking pawl 38.

[0151] On the under face of each of the lid unit 14 for transport andthe lid unit 15 for the manufacturing line, as shown in FIGS. 20 to 22,a wafer presser 91 as a thin plate presser is provided. The waferpresser 91 is a member for supporting a plurality of semiconductorwafers housed in the container body 12 from above. The wafer presser 91is constructed by a base-end supporting portion 92, an elasticsupporting plate 93 and contact pieces 94.

[0152] The base-end supporting portion 92 is a member for supporting theelastic supporting plate 93 and the contact pieces 94. The base-endsupporting portion 92 is formed in a square bar shape along the overalllength of the wafer presser 91 and is fixed on the under face of the lidunit.

[0153] The elastic supporting plate 93 is a member for elasticallysupporting the contact piece 94. The elastic supporting plates 93 arearranged, as many as the number corresponding to the number ofsemiconductor wafers housed in the container body 12. The elasticsupporting plates 93 are fixed to the base-end supporting portion 92 ina state where they are arranged in a horizontal line. The elasticsupporting plate 93 is constructed by a first supporting plate piece 93Abent in an S shape in side view and a second supporting plate piece 93Bbent in an U shape. The base-end portion of the first supporting platepiece 93A is fixed to the base-end supporting portion 9 2, and a firstcontact piece 9 4A is fixed at the tip of the first supporting platepiece 93A. The base-end portion of the second supporting plate piece 93Bis integrally connected to the first supporting plate piece 93A via afirst contact piece 94A, and a second contact piece 94B is fixed to thetip of the second supporting plate piece 93B.

[0154] The contact piece 94 is a member for directly supporting asemiconductor wafer. The contact piece 94 is constructed by the firstcontact piece 94A and the second contact piece 9 4B and eachsemiconductor wafer is supported in two positions. The contact piece 94is constructed by two blocks 96 and supporting pawls 97 alternatelyarranged.

[0155] Each of the blocks 96 has an inclined surface 96A and a contactsurface 96B. The inclined surface 96A is formed so that the two blocks96 are open to the outside in a state where they are attached so as toface each other. Consequently, the peripheral portion of a semiconductorwafer is easily inserted between the two blocks 96. The contact surfaces96B are formed so as to construct a groove having a predetermined width(width slightly wider than the thickness of the semiconductor wafer) ina state where the two neighboring blocks 96 are attached so as to faceeach other.

[0156] The supporting pawls 97 are members which come into directcontact with the peripheral portion of a semiconductor wafer to supportthe semiconductor wafer. The supporting pawl 97 is provided for thecontact surface 96B of each block. The supporting pawl 97 takes the formof a vertically-long projection. The supporting pawls 97 are provided onthe facing contact surfaces 96B in a staggered configuration.Specifically, two supporting pawls 97 are provided at both ends of thecontact surface 96B as one of the contact surfaces 96B, and onesupporting pawl 97 is provided in the center of the other contactsurface 96B, thereby disposing the facing supporting pawls 97 in astaggered configuration. Each of the supporting pawls 97 is formed by anelastic material, and elastically supports the peripheral portion of asemiconductor wafer. Since the width between the two contact surfaces96B is slightly wider than the thickness of the semiconductor wafer, theinterval between the tips of the supporting pawls 97 disposed on thecontact surfaces 96B is narrower than the thickness of the semiconductorwafer. Consequently, the semiconductor wafer is inserted between thesupporting pawls 97 while slightly pushing the supporting pawls 97 madeof the elastic member and disposed alternately. Accordingly, theperipheral portion of a semiconductor wafer is supported by thesupporting pawls 97 disposed alternately with reliability.

[0157] A lid unit holder 100 is provided on the outside of the lid unit15 for the manufacturing line, as shown in FIG. 23. The lid unit holder100 is a member for preventing the lid unit 15 for the manufacturingline from being come off from the container body 12. The lid unit holder100 is constructed by a supporting plate 101, hooks 102, and fittingprojections 103.

[0158] The supporting plate 101 is a member for supporting the hooks 102and the fitting projections 103. The hooks 102 are provided at both endsof the supporting plate 101. The hooks 102 are caught by the flange ofthe container body 12.

[0159] The fitting projections 103 are provided on one side surface ofthe supporting plate 101. The fitting projection 103 is formed in thesame shape as the key groove 62 and is fit into the key groove 62 viathe key hole 76. Two fitting projections 103 are provided in thepositions aligned with the two key grooves 62. Consequently, in a statewhere the hooks 102 are caught by the flange of the container body 12,the fitting projections 103 are fit in the key grooves 62 to fix thefeeding member 43. This is to prevent the lid unit 15 for themanufacturing line fixed to the container body 12 from being loosenedwhen the feeding member 43 swings due to vibration, shock, and the likeduring transportation of the thin plate supporting container.

[0160] The thin plate supporting container 11 constructed as describedabove is used as follows.

[0161] In the case of detaching the lid unit 15 for the manufacturingline from the container body 12, the latch key is inserted in the keygroove 62 and turned. By the operation, from the state of FIG. 24A, thefeeding member 43 is turned and the locking member 42 is graduallyretracted. The tip sliding surface 55A of the fulcrum portion 55 of thelocking member 42 slides along the oblique surface 40A of the tip-sidecam 40 and, as shown in FIGS. 24B, 24C, and 24D, the tip fitting portion56 is pushed downward. Simultaneously, the base-end sliding surface 52of the locking member 42 slides along the oblique surface 39 a of thebase-end lower cam 39, and the base-end portion of the locking member 42is pushed up. The tip fitting portion 56 is thereby completely housed inthe body 30. After that, the lid unit 15 for the manufacturing line isdetached from the container body 12.

[0162] In the case of attaching the lid unit 15 for the manufacturingline to the container body 12, the lid unit 15 for the manufacturingline is attached to the lid unit receiving portion 21 and the latch keyis fit in the key groove 62 and turned. By the operation, in contrast tothe above case, the locking member 42 is projected from the body 30. Atthis time, the fulcrum portion 55 of the locking member 42 slides alongthe oblique surface 40A of the tip-side cam 40 and the tip fittingportion 56 is pushed upward. Further, the cam pressing projection 69comes into contact with the oblique surface 53A of the base-end uppercam 53 and the base-end portion of the locking member 42 is presseddown. By the operation, the base-end sliding surface 52 of the lockingmember 42 is pushed downward along the oblique surface 39A of thebase-end lower cam 39.

[0163] In the fulcrum portion 55 of the locking member 42, the tipsliding surface 55A fits in the fitting recess 40B, and the lockingmember 42 swings around the fitting recess 40B as a center.

[0164] In the base-end portion of the locking member 42, thebase-end-side sliding surface 52 slides along the oblique surface 39A ofthe base-end lower cam 39 and the cam pressing projection 69 comes intocontact with the oblique surface 53A of the base-end upper cam 53 topress the base-end portion of the locking member 42 downward.

[0165] The locking member 42 functions as a lever using the fulcrumportion 55 fit in the fitting recess 40B as a fulcrum and, in a statewhere the tip fitting portion 56 is fit in the second fitting portion 24of the lid unit receiving portion 21, strongly presses the lid unit 15for the manufacturing line against the container body 12 so as to befixed.

[0166] In a state where the lid unit 15 for the manufacturing line isattached to the container body 12, the lid unit holder 100 is attached.Specifically, the hooks 102 are caught by the flange of the containerbody 12, so that the fitting projections 103 are fit in the key groove62 to fix the feeding member 43.

[0167] In the container body 12, the peripheral portion of asemiconductor wafer is fit in the contact piece 94. In the contact piece94, the peripheral portion of the semiconductor wafer is fit between thesupporting pawls 97 disposed in a staggered configuration and is firmlysupported by the supporting pawls 97.

[0168] In the case where a strong shock is applied from the outside ofthe thin plate supporting container 11, since the locking member 42strongly presses the lid unit 15 for the manufacturing line against thecontainer body 12 by the action of a lever, the lid unit 15 for themanufacturing line is not taken off from the container body 12. Further,since the feeding member 43 is fixed by the lid unit holder 100, thelocking member 42 does not come off from the second fitting portion 24due to turn of the feeding member 43.

[0169] On the other hand, the semiconductor wafer in the thin platesupporting container 11 is fit in the contact piece 94 of the waferpresser 91 and is supported from both sides by the supporting pawls 97disposed in a staggered configuration, so that the semiconductor waferdoes not come off from the contact piece 94. Further, since the contactpiece 94 is supported by the elastic supporting plate 93, the firstsupporting plate piece 93A and the second supporting plate piece 93Bsupport the semiconductor wafer by their elasticity or by being incontact with the under face of the lid unit 15 for the manufacturingline, and the semiconductor wafer is prevented from being damaged.

[0170] In the case of cleaning, by sliding the cover presser 46 so as tobe detached from the locking pawls 38, the simple attaching/detachingmechanism 32 can be disassembled into the locking member 42, feedingmember 43, cam mechanism 44, holding cover 45, and cover presser 46which can be individually cleaned and dried.

[0171] The thin plate supporting container 11 produces the followingeffects.

[0172] (1) Since the locking member 42 is projected by using the actionof a lever, the lid unit 15 for the manufacturing line can be securelyfixed to the container body 12 with a strong power.

[0173] (2) Since the simple attaching/detaching mechanism can be easilydisassembled into component parts, in the case of cleaning themechanism, the mechanism can be detached and disassembled into thecomponent parts, and the component parts can be individually cleaned andpromptly dried.

[0174] (3) Since the supporting pawls 97 are disposed in a staggeredmanner, the supporting pawls 97 come into contact with the periphery ofa semiconductor wafer and a semiconductor wafer can be supported withreliability.

Second Embodiment

[0175] A second embodiment of the invention will now be described. Thesecond embodiment relates to an improvement in the wafer presser.

[0176] The thin plate supporting container may be shaken due to variousfactors during transportation. When the shake is transmitted to asemiconductor wafer, in some cases, the semiconductor wafer turns due tothe shake and this is undesirable. Consequently, when the thin platesupporting container is used in a mode where it is subjected to shake, awafer presser (thin plate presser) of the second embodiment is used. Awafer presser 121 of the second embodiment will now be described withreference to FIGS. 34 to 43. Since the structure is similar to the thinplate supporting container 11 of the above first embodiment except forthe wafer presser 121, the same reference numerals are designated to thesimilar members and the description of the similar members will not berepeated.

[0177] The wafer presser 121 is constructed by, as shown in FIG. 40,base-end supporting portions 122, elastic supporting plates 123, contactpieces 124, a connecting and supporting plate 125, and supporting ribs126.

[0178] The base-end supporting portions 122 are members provided at bothends of the wafer presser 121, for directly supporting the two elasticsupporting plates 123. The base-end supporting portion 122 is formed ina rectangular rod shape so as to extend along the overall length in thelongitudinal direction (vertical direction of FIG. 35) of the waferpresser 121. On the under face of a lid unit 127, two hook-shapedsupporting portions 128 are provided. The base-end supporting portion122 is fit in the hook-shaped supporting portion 128 and fixed to therear face side of the lid unit.

[0179] The elastic supporting plate 123 is a member for elasticallysupporting the outer end of the contact piece 124. The pairs of elasticsupporting plates 123 of the number corresponding to the number ofsemiconductor wafers 120 housed in the container body 12 are arranged.The elastic supporting plates 123 are fixed to the base-end supportingportions 122 in a state where they are arranged in a line. The elasticsupporting plate 123 is formed by being bent in an S shape in side view.The base-end portions of the two elastic supporting plates 123 are fixedto two base-end supporting portions 122. The contact piece 124 isattached to the tip of each of the elastic supporting plates 123. Theelastic supporting plates 123 elastically support the contact pieces124.

[0180] The contact piece 124 is a member which comes into direct contactwith the periphery of each semiconductor wafer 120 to directly supportthe semiconductor wafer 120. As shown in FIGS. 42 and 43, on one sideface of the contact piece 124, a V-shaped fitting groove 124A in whichthe semiconductor wafer 120 fits is provided. The fitting groove 124A isa V-shaped groove having two stages. The groove in the first stage has agentle inclination of an angle of 124°. The groove in the second stagehas an inclination of an angle of 44°. With the structure, when theperiphery of the semiconductor wafer 120 comes into contact with thegroove in the first stage, the periphery of the semiconductor wafer 120is guided along the gentle slope and is dropped into the groove in thesecond stage. In the groove in the second stage, the semiconductor wafer120 is supported. The bottom of the groove in the second stage is formedin a flat surface having a width which is almost the same as thethickness of the semiconductor wafer 120. The inclination angle of thegroove in the second stage and the width of the bottom are set accordingto the dimensions of the periphery of the semiconductor wafer 120. Sincethe periphery of the semiconductor wafer 120 is cut at an edge angle of44°, the inclination angle of the groove is set to 44°. Further, thewidth of the bottom of the groove is also set in accordance with thewidth of the periphery of the semiconductor wafer 120. Consequently,when the periphery of the semiconductor wafer 120 is fit in the groovein the second stage, the semiconductor wafer 120 can be supported withreliability while being in contact with a large area and can beprevented from being turned due to shake. Although the groove in thesecond stage is set to have the inclination of 44° in accordance withthe edge angle of the semiconductor wafer 120, the angle may be smallera little in relation to the material of the contact piece 124.Specifically, the angle of the groove in the second stage is properlyset within the range from about 40° to 44° in accordance with variationin elasticity. If the angle of the groove in the second stage is toosmall, the periphery of the semiconductor wafer 120 may be caught. Insuch a case, when the lid unit 127 is lifted, the semiconductor wafer120 may be lifted together. Consequently, the angle is set so as not tocatch the semiconductor wafer 120. In the case where the edge angle ofthe semiconductor wafer 120 varies, in the case of a thin plate otherthan the semiconductor wafer 120, and the like, the angle is properlyset within the range of about 20° to 60°.

[0181] As shown in FIGS. 40 and 41, the bottom of the fitting groove124A is set at an angle according to the shape of the periphery of thesemiconductor wafer 120, that is, it is set so as to extend in thetangent direction of the periphery of the semiconductor wafer 120. Aswill be described later, elasticity increases in proportion to thedeflection amount of the wafer presser 121, so that the force ofpressing the semiconductor wafer 120 is equalized by the contact pieces124. That is, as a change amount of one of the two contact pieces 124increases, the elasticity increases according to the change amount, thecontact piece 124 slightly pushes the semiconductor wafer 120 to theother contact piece 124 side, and the elastic forces of the two contactpieces 124 are settled at the same strength. As a result, the elasticforces of the right and left contact pieces are automatically adjustedso as to become the same. Further, it is set so that, in a state wherethe lid unit 127 is attached to the container body 12, the semiconductorwafer 120 comes into contact with the bottom in an almost center portion(contact A in FIG. 41) of the fitting groove 124A.

[0182] The connecting and supporting plate 125 is a member forconnecting the two contact pieces 124 and supporting them. Both ends ofthe connecting and supporting plate 125 are connected to the contactpieces 124 and elastically support the contact pieces 124. Theconnecting and supporting plate 125 is formed by being bent in an almostU shape in side view. Specifically, the connecting and supporting plate125 is constructed by vertical plates 125A and 125B on both sides and ahorizontal plate 125C. The vertical plates 125A and 125B are disposed ina direction perpendicular to the rear face of the lid unit 127 andsupport the contact pieces 124 almost without being deflected.

[0183] The horizontal plate 125C is elastically deflected. The functionof elastically supporting the contact pieces 124 by the connecting andsupporting plate 125 is mainly carried out by the horizontal plate 125C.The horizontal plate 125C is disposed so as to be along the rear face ofthe lid unit 127 in a state where the vertical plates 125A and 125B areconnected to both ends of the horizontal plate 125C. The center portionof the horizontal plate 125C is supported by a supporting projection bar131 which will be described later. Both ends of the horizontal plate125C are deflected around the supporting projection bar 131 as a center.

[0184] The elastic force generated by deformation of the horizontalplate 125 (elastic force for supporting the contact piece 124, of theconnecting and supporting plate 125) is set to be stronger than theelastic force of supporting the contact piece 124, of the elasticsupporting plate 123. Therefore, the inner ends of the two contactpieces 124 are supported by the stronger elastic force, and the outerends are supported by the weaker elastic force. The bottom of thefitting groove 124A of each of the two contact pieces 124 is disposed inthe tangent direction of the periphery of the semiconductor wafer 120 asdescribed above. With the structure, it is set so that the power ofsupporting the semiconductor wafer 120, of the wafer presser 121increases in proportional to the movement amount (amount of shake) ofthe semiconductor wafer 120. That is, in a normal state, as shown by asolid line in FIG. 41, the semiconductor wafer 120 is supported by beingin contact with the bottom of the fitting groove 124A in an almostcenter portion (contact point A in FIG. 41) of the bottom. When thesemiconductor wafer 120 is shaken, the inner end of the contact piece124 supported by the stronger elastic force of the connecting andsupporting plate 125 does not change so much but the external endsupported by the weaker elastic force of the elastic supporting plate123 largely changes, so that, as shown by an imaginary line in FIG. 41,the semiconductor wafer 120 is moved toward the inner end side (contactpoint B side in FIG. 41) on the bottom of the fitting groove 124A andsupported. Therefore, when the amount of shake in the semiconductorwafer 120 is small (the deflection amount of the wafer presser 121 issmall), the outer end side (contact point A side in FIG. 41) of thesemiconductor wafer 120 comes into contact with the bottom of thefitting groove 124A and is supported with the weaker elastic force. Whenthe amount of shake in the semiconductor wafer 120 increases (thedeflection amount of the wafer presser 121 increases), the contact pointof the semiconductor wafer 120 moves toward the inner end (contact pointB side in FIG. 41) of the fitting groove 124A and the semiconductorwafer 120 is supported with the stronger elastic force. Further, as theamount of movement to the inner end of the contact point of thesemiconductor wafer 120 increases, the power applied to the connectingand supporting plate 125 increases more than to the elastic supportingplate 123, and the elastic force increases, so that shake of thesemiconductor wafer 120 is efficiently suppressed.

[0185] The supporting rib 126 is a supporting member for supporting theconnecting and supporting plate 125 to prevent the connecting andsupporting plate 125 from being deviated in the direction along the rearface of the lid unit. The supporting rib 126 is provided in the centerportion of the rear face of the lid unit 127 as shown in FIGS. 34 to 40.The supporting rib 126 is provided so as to cover all of a number ofconnecting and supporting plates 125 of the wafer presser 121 disposed.Specifically, the supporting rib 126 is set to have a length in whichall of the connecting and supporting plates 125 arranged of the numbercorresponding to the number of the semiconductor wafers 120 to be housedcan be fit. The supporting rib 126 is constructed by two supportingwalls 129 and 130.

[0186] The supporting walls 129 and 130 are provided so as to face eachother and in parallel with each other. Each of the supporting walls 129and 130 is constructed by a supporting plate piece 133 and a partitionplate piece 134.

[0187] The supporting plate piece 133 is a member for supporting thevertical plates 125A and 125B of the connecting and supporting plate 125so as not to be deviated in the circumferential direction of thesemiconductor wafer 120 (the lateral direction in FIG. 40). Thesupporting plate piece 133 directly supports the vertical plates 125Aand 125B of the connecting and supporting plate 125, thereby indirectlysupporting the contact pieces 124 so as not to be deviated in thecircumferential direction of the semiconductor wafer 120.

[0188] The partition plate pieces 134 are plate pieces for partitioninga number of connecting and supporting plates 125 disposed. The partitionplate pieces 134 are positioned on the outermost sides and between theneighboring connecting and supporting plates 125. Accordingly, thepartition plate pieces 134 support each of the connecting and supportingplates 125 from both sides in the width direction. The partition platepieces 134 directly support the connecting and supporting plates 125,thereby indirectly supporting the contact pieces 124 so as not to bedeviated in the direction orthogonal to the circumferential direction ofthe semiconductor wafer 120.

[0189] By sandwiching the connecting and supporting plate 125 with thesupporting plate piece 133 and the partition plate piece 134 from theperiphery (in the direction orthogonal to the circumferential directionof the semiconductor wafer 120 housed in the container body 12), adeviation in the direction along the rear surface of the lid unit of theconnecting and supporting plate 125 is prevented and fluctuations in thedirection perpendicular to the rear surface of the lid unit are allowed.

[0190] The supporting plate piece 133 and the partition plate piece 134and the connecting and supporting plate 125 are set so as to have asmall gap therebetween, thereby preventing coming into contact with eachother when small shake occurs. That is, when the semiconductor wafer 120is shaken slightly, the connecting and supporting plate 125 is deflectedwithout coming into contact with the supporting plate piece 133 and thepartition plate piece 134, thereby absorbing shake. When the shakebecomes harder, the connecting and supporting plate 125 is also shakenhard via the contact pieces 124. Consequently, the connecting andsupporting plate 125 is supported by being in contact with thesupporting plate piece 133 and the partition plate piece 134.

[0191] Between the two supporting walls 129 and 130 of the supportingribs 126, as shown in FIG. 34 and FIGS. 37 to 39, the supportingprojection bar 131 is provided. The supporting projection bar 131 is amember which is in direct contact with the connecting and supportingplates 125 to support the connecting and supporting plates 125.Specifically, the center portion of the horizontal plate 125C of each ofthe connecting and supporting plates 125 is supported by the supportingprojection bar 131 by being in contact, and both ends of the horizontalplate 125C can be freely deflected. The supporting projection bar 131 isprovided in the center portion between the two supporting walls 129 and130 in parallel with the supporting walls 129 and 130, and its length isalmost the same as the supporting walls 129 and 130. The two supportingwalls 129 and 130 are provided in parallel so as to face each other.

[0192] The supporting projection bar 131 is as shown in FIGS. 38 and 39.That is, the supporting projection bar 131 is formed in such a mannerthat both sides are thin (“b” side in FIG. 38) and the center side (“a”side in FIG. 38) is thick so as to make the contact piece 124 positionedin the center projected to the semiconductor wafer 120 side more thanthe contact pieces 124 positioned on both sides. In the embodiment, thesupporting projection bar 131 is formed so as to be arched as a whole.By the structure, it is set so that, as shown in FIG. 39, the intervalbetween the supporting projection bar 131 and the connecting andsupporting plates 125 is wide on both sides and narrow in the center ina state where the wafer presser 121 is attached to the lid unit 127.Specific dimensions of the supporting projection bar 131 are properlyset in accordance with the deflection amount of the lid unit 127.

[0193] The supporting projection bar 131 is formed as described abovefor the following reasons. When the lid unit 127 is attached in a statewhere a plurality of semiconductor wafers 120 are housed in thecontainer body 12, predetermined repulsion acts on the lid unit 127. Thewafer presser 121 attached to the rear face of the lid unit supportseach of the semiconductor wafers 120 with certain force. Consequently,the larger the force of supporting the semiconductor wafer 120 becomesin association with increase in the diameter of the semiconductor wafer120 or the larger the number of the semiconductor wafers 120 becomes,the larger the repulsion to the wafer presser 121 becomes. By therepulsion, the lid unit 127 to which the wafer presser 121 is attachedis slightly deflected to the outside. When the lid unit 127 is deflectedto the outside, the force of supporting the semiconductor wafers 120 bythe wafer presser 121 becomes weaker in the center portion. To solve nonuniform force of supporting the semiconductor wafers 120, the supportingprojection bar 131 is provided. By the supporting projection bar 131 ofwhich center portion is thicker, deflection of the lid unit 127 isabsorbed. The wafer presser 121 supports the semiconductor wafers 120with uniform force.

[0194] The thin plate supporting container having structure as describedabove acts as follows.

[0195] When the lid unit 127 is attached in a state where a plurality ofsemiconductor wafers 120 are housed in the container body 12, the waferpresser 121 fits with the semiconductor wafers 120. Specifically, thefitting groove 124A in each of the contact pieces 124 fits with theperiphery of the semiconductor wafer 120, and the periphery of thesemiconductor wafer 120 is guided to the bottom of the fitting groove124A. In a state where the periphery of the semiconductor wafer 120 isfit in the groove in the second stage, the periphery of thesemiconductor wafer 120 is caught in the groove in the second stage, anda wide area of the semiconductor wafer 120 is in contact with the grooveand supported with reliability. Each of the contact pieces 124 issupported by the elastic supporting plate 123 and the connecting andsupporting plate 125.

[0196] The elastic supporting plate 123 elastically supports the outerend of each of the contact pieces 124 by its tip portion in a statewhere its base-end portion is supported by the base-end supportingportion 122 fixed to the rear face of the lid unit 127. The connectingand supporting plate 125 elastically supports the inner end of thecontact piece 124 by its both ends in a state where the center portionis supported by the supporting ribs 126.

[0197] Further, the arched supporting projection bar 131 supports thecontact piece 124 in a state where the supporting projection bar 131absorbs deflection of the lid unit 127. Accordingly, the contact pieces124 support the semiconductor wafers 120 with uniform force.

[0198] The inner end of each of the contact pieces 124 is elasticallysupported with relatively strong force and the outer end is elasticallysupported with relatively weak force. At this time, the contact piece124 is in contact with the semiconductor wafer 120 in a state where thebottom portion of the fitting groove 124A is along the tangentialdirection of the periphery of the semiconductor wafer 120. The elasticforces of the two contact pieces 124 are automatically adjusted so as tobe the same to equalize the force of pressing the semiconductor wafer120 as a whole. In such a manner, the semiconductor wafer 120 is stablysupported.

[0199] When shake is applied to the thin plate supporting containerduring transportation or the like of the thin plate supportingcontainer, the semiconductor wafer 120 is also shaken. Further,according to the shake of the semiconductor wafer 120, the contactpieces 124 is also shaken.

[0200] When the shake is small, the amplitude of each of the contactpieces 124 is small, so that the contact point between the semiconductorwafer 120 and the contact piece 124 is on the outer side (for example,around the contact point A in FIG.41). The elastic supporting plate 123is mainly deflected, and the semiconductor wafer 120 is supported withweak elastic force.

[0201] When the shake is large, the amplitude of the contact piece 124is large, so that the contact point between the semiconductor wafer 120and the contact piece 124 is shifted to the inner side (for example,around the contact point B in FIG. 41). According to the shift amount,the force applied to the connecting and supporting plate 125 becomeslarger than that to the elastic supporting plate 123, and the elasticforce increases. Consequently,when the semiconductor wafer 120 islargely shaken, the contact piece 124 pushes back the semiconductorwafer 120 with strong elastic force, thereby suppressing the shake ofthe semiconductor wafer 120. In such a manner, according to the strengthof shake, the force of supporting the semiconductor wafer 120 isautomatically changed and the semiconductor wafer 120 is supported withreliability.

[0202] As a result, all of the semiconductor wafers 120 are supportedwith uniform force, the shake of the semiconductor wafer 120 caused byshake from the outside can be minimized, and the semiconductor wafer 120can be prevented from rotating.

[0203] Modifications

[0204] (1) In the first embodiment, the wafer presser 91 is constructedby the base-end supporting portion 92, elastic supporting plate 93, andcontact piece 94. In a modification, as shown in FIGS. 25, 26, and 27,the wafer presser is constructed by a base-end supporting portion 110,an elastic supporting plate 111, and a contact piece 112. The elasticsupporting plate 111 supports one end of the contact piece 112 in astate where the base-end portion of the elastic supporting plate 111 isfixed to the base-end supporting portion 110. Further, the elasticsupporting plate 111 is extended from the other end of the contact piece112 to the under face of the lid unit 15 for the manufacturing line. Aninclined surface 112A and a contact surface 112B of the contact piece112 have functions similar to those of the inclined surface 96A and thecontact surface 96B, respectively, of the above embodiment. Threesupporting pawls 113 on the inclined face 112A and three supportingpawls 113 on the contact face 112B are disposed so as to face each otheralternately. The number of the supporting pawls 113 may be changed ifnecessary.

[0205] The structure can also produce actions and effects similar tothose of the above embodiment.

[0206] (2) Although the wafer presser 91 has a one-side supportingstructure in the first embodiment, as shown in FIGS. 28 and 29, it canalso have a both-side supporting structure. The elastic supporting plateis attached between and on both sides of the contact pieces so as tosupport the contact pieces in a state where the elastic supporting platebetween the contact pieces is slightly floated from the under face ofthe lid unit 15 for the manufacturing line only by a gap S.

[0207] Since the contact piece is supported by the elastic supportingplate between the contact pieces in a state where it is slightly floatedfrom the attachment face, a thin plate is supported with a force whichis normally not so strong. When a large shock is given from the outside,like a case where the thin plate supporting container is dropped bymistake, the gap S disappears, and the elastic supporting plate betweenthe contact pieces comes into contact with the supporting face andstrongly supports the contact pieces. In such a manner, a thin plate isprotected from a strong shock.

[0208] (3) Although a semiconductor wafer is supported by the supportingpawls 97 in the above first embodiment, it may be supported by blocks.As shown in FIGS. 30 and 31, like the above embodiment, blocks 115 aredisposed alternately in a state where two blocks 115 face each other.That is, four sets of blocks 115 are arranged while maintaining theintervals and are deviated from each other. Further, the contactsurfaces 115A in a set of blocks 115 are set at 20°and 4° from thevertical line. The contact surface 115A on the side with which thesemiconductor wafer comes in contact is set to 4°. By sandwiching theperiphery of a semiconductor wafer with the blocks at the angle 4° each(8° by both sides), without deviating the semiconductor wafer, thesemiconductor wafer can be supported with reliability.

[0209] Alternately, the blocks may be provided as shown in FIGS. 32 and33. The configuration is similar to that described with reference toFIGS. 28 and 29 and can produce actions and effects similar to theabove.

[0210] (4) Although an example of using the lid unit for the thin platesupporting container in the manufacturing line has been described in thefirst embodiment, the lid unit for the thin plate supporting containercan be also used for storage, transport, and the like. In this case aswell, actions and effects similar to those of the above embodiment canbe produced.

[0211] (5) Although two simple attaching/detaching mechanisms 32 areprovided for the lid unit 15 for the manufacturing line in the firstembodiment, the number of the simple attaching/detaching mechanisms 32may be one or three or more in accordance with the standard or the like.

[0212] (6) Although the case of applying the lid unit for a thin platesupporting container to a container for housing semiconductor wafers hasbeen described in the first embodiment, the lid unit can be applied notonly to the container for housing semiconductor wafers but also to acontainer for housing other thin plates. In this case as well, actionsand effects similar to those in the above embodiment can be produced.

[0213] (7) In the first embodiment and the modification, the waferpresser as a thin plate presser for supporting a thin plate housed in acontainer body is applied to the thin plate supporting container 11 ofthe embodiment. The invention is not limited to the thin platesupporting container 11 but can be also applied to thin plate supportingcontainers having other structures. In this case as well, actions andeffects similar to those of the above embodiment can be produced.

[0214] (8) Although the lid unit holder 100 is applied to the thin platesupporting container 11 in the first embodiment, the invention is notlimited to the thin plate supporting container. The lid unit holder 100can be also applied to thin plate supporting containers having the otherstructures. In this case as well, actions and effects similar to thoseof the above embodiment can be produced.

[0215] (9) Although two contact pieces 124 of the wafer presser 121 areprovided in the second embodiment, three or more contact pieces 124 maybe provided. In the case of providing three or more contact pieces 124,the connecting and supporting plate 125 and the supporting rib 126 areprovided between the neighboring contact pieces 124. In this case aswell, actions and effects similar to those in the above embodiment canbe produced.

[0216] (10) In the second embodiment, the horizontal plate 125C issupported by the supporting projection bar 131. Alternately, asupporting projection may be provided in the center of the horizontalplate 125C. In the case of providing the supporting projection, thesupporting projection bar 131 may not be provided. In the case ofproviding the supporting projection bar 131, the supporting projectionsupports the horizontal plate 125C by being in contact with thesupporting projection bar 131. In the case where the supportingprojection bar 131 is not provided, the supporting projection supportsthe horizontal plate 125C by being in contact with the rear face of thelid unit 127.

[0217] In the case where the supporting projection bar 131 is notprovided, the height of the supporting projection in the center of thehorizontal plate 125C is set so that the center portion is higher thanboth sides as in the second embodiment. In the case of providing thesupporting projection bar 131, the height obtained by adding thesupporting projection in the center portion of the horizontal plate 125Cand the supporting projection bar 131 is set so that the center portionis higher than the both sides. In this case as well, actions and effectssimilar to those in the second embodiment can be produced.

[0218] (11) Although the fitting groove 124A of the contact piece 124 isformed in a V shape in the second embodiment, like the contact piece 94in the first embodiment, supporting pieces disposed alternately may beprovided for the contact piece 124. That is, the contact piece 124 ofthe second embodiment may be constructed by, like the contact piece 94of the first embodiment, the two blocks 96 and the alternately disposedsupporting pawls 97.(supporting pieces). With the structure, thesupporting pieces disposed alternately are in contact with the peripheryof the semiconductor wafer 120, so that the semiconductor wafer 120 issupported with reliability. As a result, shake of the semiconductorwafer 120 caused by the vibrations from the outside can be minimized. Inaddition, the semiconductor wafer 120 can be prevented from beingrotated more reliably.

[0219] (12) The structure for supporting the contact piece 124 of thewafer presser 121 is not limited to the structure of the secondembodiment but may be another structure. Any structure may be employedas long as the contact piece 124 positioned to the center side ascompared with the contact pieces positioned on both sides can bedisposed so as to be projected to the semiconductor wafer 120 side.

[0220] For example, the elastic supporting plate 123 may be formed so asto dispose the contact piece 124 positioned to the center side ascompared with the contact pieces 124 positioned on both sides so as tobe projected to the semiconductor wafer 120 side. Any one of the elasticsupporting plate 123 and the connecting and supporting plate 125 or bothmay be formed so as to dispose the contact piece 124 which is positionedto the center side as compared with the contact pieces 124 positioned onboth sides so as to be projected to the semiconductor wafer 120 side.

[0221] (13) Although the connecting and supporting plate 125 issupported by the supporting ribs 126 in the second embodiment, it can besupported by projections. Specifically, as shown in FIG. 44, theconnecting and supporting plate 125 may be supported by a fittingprojection 142 which is fit in a fitting hole 141 opened in theconnecting and supporting plate 125, thereby preventing deviation of theconnecting and supporting plate 125 along the rear surface of the lidunit while allowing fluctuations in the direction perpendicular to therear surface of the lid unit. In this case as well, actions and effectssimilar to those of the second embodiment can be produced.

What is claimed is:
 1. A lid unit for a thin plate supporting containerfor closing a container body of a thin plate supporting container inwhich a plurality of thin plates are housed and which is carried,comprising a simple attaching/detaching mechanism which can be easilyattached/detached to/from the container body, the simpleattaching/detaching mechanism comprising: a locking member which isprojected and retained by the container body side; a feeding memberwhich is connected to the locking member to make the locking memberproject/retract; a tip-side cam for pressing a tip side of the lockingmember to one side when the locking member is projected by the feedingmember; and a base-end-side cam for pressing a base-end side of thelocking member to the other side when the locking member is projected.2. The lid unit for a thin plate supporting container according to claim1, wherein the tip-side cam has an oblique surface for pushing the tipside of the locking member to the one side.
 3. The lid unit for a thinplate supporting container according to claim 1, wherein thebase-end-side cam has an oblique surface for pushing the base-end sideof the locking member to the other side.
 4. The lid unit for a thinplate supporting container according to claim 1, wherein a fulcrumportion of swing of the locking member is provided on the tip side ofthe locking member.
 5. The lid unit for a thin plate supportingcontainer according to claim 1, wherein the simple attaching/detachingmechanism is detachably attached and can be disassembled to componentparts.
 6. A lid unit for a thin plate supporting container for closing acontainer body of a thin plate supporting container in which a pluralityof thin plates are housed and which is carried, comprising a thin platepresser for supporting thin plates housed in the container body, whereinthe thin plate presser has supporting pieces disposed alternately. 7.The lid unit for a thin plate supporting container according to claim 6,wherein the thin plate presser comprises two contact pieces havingsupporting pieces disposed alternately and an elastic supporting platefor elastically supporting the contact pieces, the elastic supportingplate is attached between and on both sides of the contact pieces, andthe elastic supporting plate between the contact pieces supports thecontact pieces in a state where the elastic supporting plate is slightlyfloated.
 8. A lid unit for a thin plate supporting container for closinga container body of a thin plate supporting container in which aplurality of thin plates are housed and which is carried, comprising alid unit holder for fixing the lid unit from the outside in a statewhere the lid unit is attached to the container body.
 9. A lid unit fora thin plate supporting container for closing a container body of a thinplate supporting container in which a plurality of thin plates arehoused and which is carried, comprising a thin plate presser forsupporting a plurality of thin plates housed in the container body,wherein the thin plate presser has a plurality of contact pieces whichare disposed in parallel and come into contact with the plurality ofthin plates, and the parallel contact pieces are disposed so that thecontact piece positioned in a center portion is projected to the thinplate side more than the contact pieces positioned on both sides. 10.The lid unit for a thin plate supporting container according to claim 9,wherein the thin plate presser comprises: a base-end supporting portionfixed to the rear surface of the lid unit; and a plurality of elasticsupporting plates supported by the base-end supporting portion and eachsupporting one end of each of the contact pieces, and each of theelastic supporting plates for supporting the contact pieces is formed sothat the contact piece positioned in the center portion is projected tothe thin plate side more than the contact pieces positioned on bothsides.
 11. The lid unit for a thin plate supporting container accordingto claim 9, wherein the thin plate presser comprises: a base-endsupporting portion fixed to the rear surface of the lid unit; aplurality of one-side elastic supporting plates supported by thebase-end supporting portion and supporting one end of each of thecontact pieces; and a plurality of other-side elastic supporting platessupporting the other end of each of the contact pieces and in contactwith the rear surface of the lid unit, and any one of the one-sideelastic supporting plate and the other-side elastic supporting plate forsupporting each of the contact pieces or both are/is formed so that thecontact piece positioned in the center portion is projected to the thinplate side more than the contact pieces positioned on both sides. 12.The lid unit for a thin plate supporting container according to claim 9,wherein the thin plate presser comprises: a base-end supporting portionfixed to the rear surface of the lid unit; a plurality of one-sideelastic supporting plates supported by the base-end supporting portionand each supporting one end of each of the contact pieces; a pluralityof other-side elastic supporting plates each supporting the other end ofeach of the contact pieces and in contact with the rear surface of thelid unit; and a supporting projection bar provided on the rear surfaceside of the lid unit and in contact with the other-side elasticsupporting plates to thereby support the other-side elastic supportingplates, and any one of the supporting projection bar and the other-sideelastic supporting plate or both are/is formed so that the contact piecepositioned in the center portion is projected to the thin plate sidemore than the contact pieces positioned on both sides.
 13. The lid unitfor a thin plate supporting container according to claim 9, wherein thecontact piece has a V-shaped groove having an inclination of 40° to 44°.14. A lid unit for a thin plate supporting container for closing acontainer body of a thin plate supporting container in which a pluralityof thin plates are housed and which is carried, comprising a thin platepresser for supporting thin plates housed in the container body, thethin plate presser comprising: two base-end supporting portions fixed toa rear surface of the lid unit; a plurality of contact pieces which aredisposed along the periphery of the thin plate and come into directcontact with the thin plate; two elastic supporting plates supported bythe base-end supporting portions and supporting an outer end of each ofcontact pieces at both ends among the plurality of contact pieces; aconnecting and supporting plate for connecting and supporting thecontact pieces; and a supporting member for preventing a deviation ofthe connecting and supporting plate along the rear surface of the lidunit while permitting fluctuations in the direction perpendicular to therear surface of the lid unit.
 15. The lid unit for a thin platesupporting container according to claim 14, wherein the supportingmember has supporting ribs for supporting each of the connecting andsupporting plates so as not to be deviated along the rear surface of thelid unit.
 16. The lid unit for a thin plate supporting containeraccording to claim 14, wherein the supporting member has a fittingprojection which is fit in a fitting hole formed in the connecting andsupporting plate, thereby preventing a deviation along the rear surfaceof the lid unit of the connecting and supporting plate while permittingfluctuations in a direction perpendicular to the rear surface of the lidunit.
 17. The lid unit for a thin plate supporting container accordingto claim 14, wherein elastic force for supporting the contact piece bythe connecting and supporting plate is stronger than elastic force forsupporting the contact piece by the elastic supporting plate.